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How do Imaging Ellipsometers measure ellipsometric spectra?

Imaging Ellipsometers measure ellipsometric spectra sequentially. This means, only one wavelength/photon energy is used at a time. The measurement is repeated automatically for every target wavelength of the spectrum.

Our spectroscopic Imaging Ellipsometers are equipped with broadband light sources such as laser-stabilized Xenon lamps, Xenon arc lamps or super-continuum lasers in combination with grating monochromators, color-filter wheels or acousto-optic tunable filters (AOTFs).