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Referenced spectroscopic ellipsometer RSE

nanofilm_rse

Referenced spectroscopic ellipsometer RSE with wafer
Referenced spectroscopic ellipsometer RSE with wafer

Referenced Spectroscopic Ellipsometer

The Referenced Spectroscopic Ellipsometer (RSE) is an ellipsometer based reflectometer, designed for high speed thickness mapping in, e.g., quality control. It allows to accurately measure thicknesses from 0.1 nm - 10 µm. With 200 complete spectra recorded per second, a 100 mm x 100 mm area can be investigated in only 12 minutes while acquiring 67000 spectra.

Typical applications

  • Wafer inspection
  • Thickness of ultrathin films and interlayers
  • Thickness homogeneity of multilayers
  • Detection of contaminants
  • Thin layers on transparent substrates
  • „Single shot“ referenced spectroscopic ellipsometric measurements
  • Data rate of 200 spectra / second
  • Live data processing for evaluation of film thicknesses
  • Spot size: 50 x 100 µm micro spot at AOI = 60°
  • Film thicknesses range:  < 1nm – 10 µm
  • Spectral range: 450 – 900 nm

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Accurion GmbH became a family of Park Systems Corp.

Following the acquisition by Park Systems Corporation, Accurion GmbH is now Park Systems GmbH as of December 19th, 2022. As a member of Park Systems Corporation, Accurion Division, Park Systems GmbH will continue serving its customers without any interruption, and conduct its current production, sales, and service activities as usual until any further notice.
With added resources and merged synergy, Park Systems GmbH promises to deliver enhanced solutions and services to its customers with revamped technology and wider sales and service network.