Products

Imaging Ellipsometer Nanofilm ep4 nanofilm_ep4 Modular Imaging Ellipsometer with highest lateral resolution down to 1µm
Referenced Spectroscopic Ellipsometer nanofilm_rse Referenced Spectroscopic Ellipsometer for fast mapping or kinetics with 200 points/sec
Brewster Angle Microscope nanofilm_ultrabam Brewster Angle Microscope with unique overall focused view with 2µm lateral resolution
Surface Inspection Metrology of Nanofilms nanofilm_SIMoN Easy to use entry level device to imaging ellipsometry
Acessories for Thin Film Characterization nanofilm_accessories Enlarge your measurement possibilities by using additional accessories
Thin Film Characterization

Lateral resolution down to 1 µm

Since 1991, Accurion has become the leader in Imaging Ellipsometry and Brewster Angle Microscopy. Our main expertise is to combine optical surface analysis with microscopy. This enables contactless characterization of surfaces and thinnest films on microscopic features, such as MEMS, Microfluidics, Bio-arrays, OLED pixel and many more.

Our systems have been used for new applications like Graphene and 2D materials, inkjet printing, integrated photonics and waveguides, lipid layers etc. and their number is increasing.

The modularity of the systems and the large number of accessories allow usage in scientific research as well as integrated devices for production lines.

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Accurion GmbH became a family of Park Systems Corp.

Following the acquisition by Park Systems Corporation, Accurion GmbH is now Park Systems GmbH as of December 19th, 2022. As a member of Park Systems Corporation, Accurion Division, Park Systems GmbH will continue serving its customers without any interruption, and conduct its current production, sales, and service activities as usual until any further notice.
With added resources and merged synergy, Park Systems GmbH promises to deliver enhanced solutions and services to its customers with revamped technology and wider sales and service network.