Photonics
IMAGING ELLIPSOMETRY

Applications

  • Spectroscopic ellipsometry on small optical fibers and waveguides with lateral resolution down to 1µm
  • Precise refractive index measurement on waveguides, vertical facets and fiber ends with relative refractive index difference < 0.001
  • Precise film thickness measurement with 0.1nm thickness resolution
  • Wavelength range 190nm - 1700nm (IR upgrade to 2700nm possible)
  • Multiple results from a single measurement: Film thickness, refractive index, composition, contaminations
  • ECM mode (Ellipsometric Contrast enhanced Microscopy) for fast quality control

 

Typical applications include:

  • Photonics and waveguides
  • Integrated photonics
  • Vertical facets
  • Optical fibers

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