MEMS
IMAGING ELLIPSOMETRY

Applications

  • Spectroscopic ellipsometry on MEMS structures down to 1µm
  • Precise film thickness measurement on comb structure with 0.1nm thickness resolution
  • Multiple results from a single measurement: Film thickness, refractive index, composition, contaminations
  • ECM mode (Ellipsometric Contrast enhanced Microscopy) for fast quality control
  • Measurements on curved surfaces

 

Typical applications include:

  • MEMS sensors
  • MEMS mirrors and spring coating
  • RF MEMS
  • Thin film encapsulation
  • Gas analyzers
  • Humidity sensors

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Accurion GmbH became a family of Park Systems Corp.

Following the acquisition by Park Systems Corporation, Accurion GmbH is now Park Systems GmbH as of December 19th, 2022. As a member of Park Systems Corporation, Accurion Division, Park Systems GmbH will continue serving its customers without any interruption, and conduct its current production, sales, and service activities as usual until any further notice.
With added resources and merged synergy, Park Systems GmbH promises to deliver enhanced solutions and services to its customers with revamped technology and wider sales and service network.