Applications

• Spectroscopic ellipsometry on MEMS structures down to 1µm
• Precise film thickness measurement on comb structure with 0.1nm thickness resolution
• Multiple results from a single measurement: Film thickness, refractive index, composition, contaminations
• ECM mode (Ellipsometric Contrast enhanced Microscopy) for fast quality control
• Measurements on curved surfaces

Typical applications include:

• MEMS sensors
• MEMS mirrors and spring coating
• RF MEMS
• Thin film encapsulation
• Gas analyzers
• Humidity sensors