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MEMS
IMAGING ELLIPSOMETRY
Applications
- Spectroscopic ellipsometry on MEMS structures down to 1µm
- Precise film thickness measurement on comb structure with 0.1nm thickness resolution
- Multiple results from a single measurement: Film thickness, refractive index, composition, contaminations
- ECM mode (Ellipsometric Contrast enhanced Microscopy) for fast quality control
- Measurements on curved surfaces
Typical applications include:
- MEMS sensors
- MEMS mirrors and spring coating
- RF MEMS
- Thin film encapsulation
- Gas analyzers
- Humidity sensors