MEMS
IMAGING ELLIPSOMETRY

Applications

  • Spectroscopic ellipsometry on MEMS structures down to 1µm
  • Precise film thickness measurement on comb structure with 0.1nm thickness resolution
  • Multiple results from a single measurement: Film thickness, refractive index, composition, contaminations
  • ECM mode (Ellipsometric Contrast enhanced Microscopy) for fast quality control
  • Measurements on curved surfaces

 

Typical applications include:

  • MEMS sensors
  • MEMS mirrors and spring coating
  • RF MEMS
  • Thin film encapsulation
  • Gas analyzers
  • Humidity sensors

You couldn't find your application?

Direct call
Mail
Contact