Displays
IMAGING ELLIPSOMETRY

Applications

  • Spectroscopic measurements on few micron small regions, using patented ROI (Region Of Interest) concept
  • Each ROI (Region Of Interest) corresponds to another layer stack 
    ⇒ Multiple measurements in a single run
  • Coupling thicknesses between different models allows uncorrelating the results of multi layer films
  • UV wavelength range down to 190nm to characterize display materials
  • Multiple results from a single measurement: Thicknesses, optical dispersions, compositions
  • Pattented RCE6 mode allows tact times of < 20s

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