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- Spectroscopic measurements on few micron small regions, using patented ROI (Region Of Interest) concept
- Each ROI (Region Of Interest) corresponds to another layer stack
⇒ Multiple measurements in a single run
- Coupling thicknesses between different models allows uncorrelating the results of multi layer films
- UV wavelength range down to 190nm to characterize display materials
- Multiple results from a single measurement: Thicknesses, optical dispersions, compositions
- Pattented RCE6 mode allows tact times of < 20s