Delve into the fascinating subject of Silicon-wafer surface modification by ultra-short laser pulses. Accurion’s EP4 Imaging Ellipsometer emerged as the perfect tool to provide state-of-the-art insights in this field of research.
(Paper by researches from the Bundesanstalt für Materialforschung und Prüfung Berlin, Princeton University, Friedrich-Schiller-Universität Jena, Technische Universität Chemnitz and Accurion GmbH)
